Gold(I) N-heterocyclic carbene precursors for focused electron beam-induced deposition

Seven gold(I) N-heterocyclic carbene (NHC) complexes were synthesized, characterized, and identified as suitable precursors for focused electron beam-induced deposition (FEBID). Several variations on the core Au(NHC)X moiety introduced, that is, of NHC ring (imidazole or triazole), alkyl N-substituents (Me, Et, iPr), ancillary ligand X (Cl, Br, I, CF 3 ). The seven tested FEBID in an on-substrate custom setup. effect substitutions deposit composition growth rate indicates most organic gold precursor is triazole-based, with best 15 atom % gold, while anionic trifluoromethyl group, leading to a 1 × 10 ?2 nm /e ? .